Chemical Vapor Deposition (CVD)

Chemical Vapor Deposition (CVD)

Sale price  £106.49 Regular price  £141.99
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Chemical Vapor Deposition (CVD)

Chemical Vapor Deposition (CVD)

Methods and Technologies

Written by Levi Karlsson

Sale price  £106.49 Regular price  £141.99
Out of stock
Chemical vapor deposition (CVD) refers to a vacuum deposition method used to produce high quality, high-performance, solid materials in a variety of manufacturing industries. Chapter One provides a critical review of published experimental data for thin films of silicon nitride deposited by thermal and plasma CVD, plasma CVD, high density plasma CVD, atomic layer-by-layer deposition, and hot-wire CVD. Chapter Two describes several aspects of the use of CVD for single-crystal diamond synthesis for electronics. Chapter Three describes the properties of graphene and its preparation by a number of methods with a focus on the classical CVD method on copper foil together with graphene transfer onto a dielectric substrate.
ISBN-13
9781536199499
Publication date
17 August 2021
Format
Hardback
Pages
208
Language
English

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